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		Welcome to China Micro-Nano Technology Corporation Net    　 　 　 The Ministry of Science and Technology of the People's Republic of China Ministry of Education of the People's Republic of China National Natural Science Foundation of China Chinese Society of Micro-Nano Technology Chinese International MEMS Network Shanghai Institue of Microsystem And Information Technology China Electronics Technology Group Corporation No.55 Research Institute Peking University       Tsinghua University Southeast University        Tianjin University Nankai University        Jiangsu University Chongqing University        Soochow University Harbin Institue of Technology